The 5320A is a high-precision triaxial MEMS accelerometer with a variable capacitance MEMS sensitive element that simultaneously outputs acceleration signals in all three axial directions, and features air damping and an over-range stopper design that allows the MEMS sensitive element to withstand very high shock. With very high temperature stability and accuracy, it is specifically designed for acceleration measurements at low vibration levels in the aerospace and automotive sectors. Typical applications include vibration testing in an automotive post-crash overall body triaxial motion measurement environment.
Main product features: 1. MEMS accelerometer. 2. Zero frequency DC response output. 3. Multi-range selectable. 4. High accuracy. 5. Triaxial measurement
Main application areas: high-speed rail, inclination measurement, flight test
Main technical indicators:
1. Range (±g): 2, 5, 10, 50, 200.
2. Sensitivity (mV/g): 1000, 400, 200, 40, 10
3. Frequency Response (Hz, ±3dB): 0-1000
4. Shock limit (±g): 5000
5. Operating temperature range (℃): -40-85
6.Weight (g): 65
7.Dimension (mm): 28×28×23
8.Shell material: anodized aluminum
9.Output connector: 5pin m12
